Applied Nanoscience https://doi.org/10.1007/s13204-018-0897 (2018)
Sangmin An, Chungman Kim, Wonho Jhe
We have demonstrated a nanoscratching technique using in situ direct measurement of the elastic and viscous responses of
shear dynamics for a buckled quartz nanorod tip. The buckled tip resolves the issue of direct contact of the tip apex providing
reliable and repeated usage of scratching. The linewidth of nanoscratched patterns on the Au coated glass substrate is
controlled as 100, 200, 250 nm (straight line) and 600, 800 nm (discrete line) by changing the pushing depth at 100, 200,
300 nm and 500, 700 nm, respectively, without any noticeable wear, while the effective elasticity, viscosity, elastic and
viscous force, and energy dissipation are simultaneously measured. In particular, we have investigated the dependences of
relative humidity and scratch speed, which demonstrates as a nanomechanical convergence platform for nanofabrication
https://link.springer.com/article/10.1007%2Fs13204-018-0897-3